Introduction

In chemically reacting laminar flows, such as those encountered in chemical vapor deposition (CVD) applications, accurate modeling of time-dependent hydrodynamics, heat and mass transfer, and chemical reactions (including wall surface reactions ) is important.

In this tutorial, surface reactions are considered. Modeling the reactions taking place at gas-solid interfaces is complex and involves several elementary physico-chemical processes like adsorption of gas-phase species on the surface, chemical reactions occurring on the surface, and desorption of gases from the surface back to the gas phase.

This tutorial demonstrates how to do the following:

• Create new materials and set the mixture properties.

• Model surface reactions involving site species.

• Enable physical models and define boundary conditions for a chemically reacting laminar flow involving wall surface reactions.

• Calculate the deposition solution using the pressure-based solver.

• Examine the flow results using graphics.